Experimental data of Celeritas XS direct detector for evaluation of deep learning counting approach as well as conventional connected component labeling counting and integrating. The dataset contains uniformly illuminated data with and without beam stop for MTF/DQE/DCE calculation, 4DSTEM datasets of monolayer WS2 before and after counting, and 4DSTEM datasets of SrTiO3[100] before and after counting. The zspy files can be loaded using Hyperspy(https://hyperspy.org)