Dataset for Atomic Layer Deposition of Molybdenum Oxides with Tunable Stoichiometry Enables Controllable Doping of MoS2

Moody, Michael J.; Henning, Alex; Jurca, Titel; Shang, Ju Ying; Bergeron, Hadallia; Balla, Itamar; Olding, Jack N.; Weiss, Emily A.; Hersam, Mark C.; Lohr, Tracy L.; Marks, Tobin J.; Lauhon, Lincoln J.