Detail

Silicon and Dielectric Dry-Etch Recipes

O'Brien Jr., Thomas Robert; Chow, Edmond; Nahrstedt, Klara; Lewis, Bruce; Dallesasse, John Michael

Year

2017

Source Name

pub_90_obrien_silicon

Contacts

Thomas R. O'Brien, Jr. (tobrien3@illinois.edu)

DOI

10.18126/M2C88F View on Datacite
This work contains a series of SEM images and descriptions describing various etches used commonly for dielectrics (SiNx, SiO2) and Si. Some are failures, some are successes. Each was taken on the S4800 Hitachi SEM in the Micro and Nano Technology Lab at the University of Illinois at Urbana-Champaign during the RET taking place the summer of 2016.